Showing results 3 to 6 of 6
< previous
| Issue Date | Title | Author(s) |
| 1996 | Particle agglomeration study in rf silane plasmas: In situ study by polarization-sensitive laser light scattering | Courteille, C.; Hollenstein, Ch.; Dorier, J. L.; Gay, P.; Schwarzenbach, W.; Howling, A. A.; Bertrán Serra, Enric; Viera Mármol, Gregorio; Martins, R.; Macarico, A. |
| 15-Oct-2001 | Polymorphous Si thin films from radio frequency plasmas of SiH4 diluted in Ar: A study by transmission electron microscopy and Raman spectroscopy | Viera Mármol, Gregorio; Huet, S.; Bertrán Serra, Enric; Boufendi, L. |
| Mar-1996 | Production of nanometric particles in radio frequency glow discharges in mixtures of silane and methane | Bertrán Serra, Enric; Costa i Balanzat, Josep; Viera Mármol, Gregorio; Zhang, R. Q. |
| 1999 | Ultrafine particles produced by plasma enhanced chemical vapor deposition -from SiH4, CH4, NH3 and B2H6 gas mixtures- for nanostructured ceramics applications | Bertrán Serra, Enric; Costa i Balanzat, Josep; Viera Mármol, Gregorio; Andújar Bella, José Luis; Canillas i Biosca, Adolf; Pascual Miralles, Esther |
