Browsing by Author Schmitt, J. P. M.
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
|---|---|---|
| Jul-1997 | A fully automated hot-wall multiplasma-monochamber reactor for thin film deposition | Roca i Cabarrocas, P. (Pere); Chevrier, J. B.; Huc, J.; Lloret, A.; Parey, J. Y.; Schmitt, J. P. M. |