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Title: Locally grown SnO2 NWs as low power ammonia sensor
Author: Samà, Jordi
Barth, Sven
Jiménez Díaz, Román
Prades García, Juan Daniel
Casals Guillén, Olga
Gràcia Tortadés, Isabel
Cané i Ballart, Carles
Romano Rodríguez, Alberto
Keywords: Amoníac
Detectors de gasos
Gas detectors
Issue Date: 11-Sep-2015
Publisher: Elsevier
Abstract: Localized growth of SnO2 nanowires on top of CMOS compatible micromembranes that incorporate a buried heater and prepatterned interdigitated electrodes has been achieved that presents the advantage that it allows to easily and directly integrate the advantageous properties of quasi-one dimensional structures in an advanced electronic device by a Vapor Liquid Solid (VLS) mechanism. A NWs based sensor of this type is characterized as a low power gas sensor towards NH3 at different temperatures. Stable and reproducible response is obtained, that allows detecting concentrations below the time-weighted average exposure limit for 8 h.
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It is part of: Comunicació presentada a: Eurosensors 2015 Conference, XXIX edition. September 6 to 9, 2015. Freiburg, Germany. BS 07– Micro- / nanofabrication for MEMS II [BS07-2]
Procedia Engineering, 2015, vol. 120, p. 215-219
ISSN: 1877-7058
Appears in Collections:Comunicacions a congressos (Electrònica)
Publicacions de projectes de recerca finançats per la UE

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