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Title: Ultrafine particles produced by plasma enhanced chemical vapor deposition -from SiH4, CH4, NH3 and B2H6 gas mixtures- for nanostructured ceramics applications
Author: Bertrán Serra, Enric
Costa i Balanzat, Josep
Viera Mármol, Gregorio
Andújar Bella, José Luis
Canillas i Biosca, Adolf
Pascual Miralles, Esther
Keywords: Silici
Materials nanoestructurals
Nanostructured materials
Issue Date: 1999
Publisher: Institut d'Estudis Catalans
Note: Reproducció digital del document publicat a:
It is part of: Contributions to Science, 1999, vol. 1, num. 1, p. 53-61
ISSN: 1575-6343
Appears in Collections:Articles publicats en revistes (Física Aplicada)

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