Please use this identifier to cite or link to this item: http://hdl.handle.net/2445/23863
Title: Numerical algorithm for spectroscopic ellipsometry of thick transparent films
Author: Bosch i Puig, Salvador
Pérez Tudela, Julio D.
Canillas i Biosca, Adolf
Keywords: El·lipsometria
Anàlisi numèrica
Ellipsometry
Numerical analysis
Issue Date: 1998
Publisher: Optical Society of America
Abstract: We present a numerical method for spectroscopic ellipsometry of thick transparent films. When an analytical expression for the dispersion of the refractive index (which contains several unknown coefficients) is assumed, the procedure is based on fitting the coefficients at a fixed thickness. Then the thickness is varied within a range (according to its approximate value). The final result given by our method is as follows: The sample thickness is considered to be the one that gives the best fitting. The refractive index is defined by the coefficients obtained for this thickness.
Note: http://dx.doi.org/10.1364/AO.37.001177
It is part of: Applied Optics, 1998, vol. 37, p. 1177-1179
URI: http://hdl.handle.net/2445/23863
ISSN: 0003-6935
Appears in Collections:Articles publicats en revistes (Física Aplicada)

Files in This Item:
File Description SizeFormat 
127061.pdf138.98 kBAdobe PDFView/Open


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.