Please use this identifier to cite or link to this item:
http://hdl.handle.net/2445/23863
Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Bosch i Puig, Salvador | cat |
dc.contributor.author | Pérez Tudela, Julio D. | cat |
dc.contributor.author | Canillas i Biosca, Adolf | cat |
dc.date.accessioned | 2012-04-17T07:09:02Z | - |
dc.date.available | 2012-04-17T07:09:02Z | - |
dc.date.issued | 1998 | - |
dc.identifier.issn | 0003-6935 | - |
dc.identifier.uri | http://hdl.handle.net/2445/23863 | - |
dc.description.abstract | We present a numerical method for spectroscopic ellipsometry of thick transparent films. When an analytical expression for the dispersion of the refractive index (which contains several unknown coefficients) is assumed, the procedure is based on fitting the coefficients at a fixed thickness. Then the thickness is varied within a range (according to its approximate value). The final result given by our method is as follows: The sample thickness is considered to be the one that gives the best fitting. The refractive index is defined by the coefficients obtained for this thickness. | eng |
dc.format.extent | 3 p. | - |
dc.format.mimetype | application/pdf | - |
dc.language.iso | eng | eng |
dc.publisher | Optical Society of America | - |
dc.relation.isformatof | http://dx.doi.org/10.1364/AO.37.001177 | - |
dc.relation.ispartof | Applied Optics, 1998, vol. 37, p. 1177-1179 | - |
dc.relation.uri | http://dx.doi.org/10.1364/AO.37.001177 | - |
dc.rights | (c) Optical Society of America, 1998 | - |
dc.source | Articles publicats en revistes (Física Aplicada) | - |
dc.subject.classification | El·lipsometria | eng |
dc.subject.classification | Anàlisi numèrica | cat |
dc.subject.other | Ellipsometry | eng |
dc.subject.other | Numerical analysis | eng |
dc.title | Numerical algorithm for spectroscopic ellipsometry of thick transparent films | - |
dc.type | info:eu-repo/semantics/article | eng |
dc.type | info:eu-repo/semantics/publishedVersion | - |
dc.identifier.idgrec | 127061 | - |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | - |
Appears in Collections: | Articles publicats en revistes (Física Aplicada) |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
127061.pdf | 138.98 kB | Adobe PDF | View/Open |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.