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Title: Investigations on doping of amorphous and nano-crystalline silicon films deposited by catalytic chemical vapour deposition
Author: Fonrodona Turon, Marta
Soler i Vilamitjana, David
Bertomeu i Balagueró, Joan
Andreu i Batallé, Jordi
Keywords: Catàlisi
Deposició química en fase vapor
Chemical vapor deposition
Issue Date: 2001
Publisher: Elsevier B.V.
Abstract: Hydrogenated amorphous and nanocrystalline silicon, deposited by catalytic chemical vapour deposition, have been doped during deposition by the addition of diborane and phosphine in the feed gas, with concentrations in the region of 1%. The crystalline fraction, dopant concentration and electrical properties of the films are studied. The nanocrystalline films exhibited a high doping efficiency, both for n and p doping, and electrical characteristics similar to those of plasma-deposited films. The doping efficiency of n-type amorphous silicon is similar to that obtained for plasma-deposited electronic-grade amorphous silicon, whereas p-type layers show a doping efficiency of one order of magnitude lower. A higher deposition temperature of 450°C was required to achieve p-type films with electrical characteristics similar to those of plasma-deposited films.
Note: Versió postprint del document publicat a:
It is part of: Thin Solid Films, 2001, vol. 395, num. 1-2, p. 125-129
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ISSN: 0040-6090
Appears in Collections:Articles publicats en revistes (Física Aplicada)

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