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http://hdl.handle.net/2445/103303| Title: | Locally grown SnO2 NWs as low power ammonia sensor |
| Author: | Samà Monsonís, Jordi Barth, Sven Jiménez Díaz, Román Prades García, Juan Daniel Casals Guillén, Olga Gràcia Tortadés, Isabel Cané i Ballart, Carles Romano Rodríguez, Albert |
| Keywords: | Amoníac Detectors de gasos Ammonia Gas detectors |
| Issue Date: | 11-Sep-2015 |
| Publisher: | Elsevier |
| Abstract: | Localized growth of SnO2 nanowires on top of CMOS compatible micromembranes that incorporate a buried heater and prepatterned interdigitated electrodes has been achieved that presents the advantage that it allows to easily and directly integrate the advantageous properties of quasi-one dimensional structures in an advanced electronic device by a Vapor Liquid Solid (VLS) mechanism. A NWs based sensor of this type is characterized as a low power gas sensor towards NH3 at different temperatures. Stable and reproducible response is obtained, that allows detecting concentrations below the time-weighted average exposure limit for 8 h. |
| Note: | Reproducció del document publicat a: http://doi.org/10.1016/j.proeng.2015.08.614 |
| It is part of: | Comunicació presentada a: Eurosensors 2015 Conference, XXIX edition. September 6 to 9, 2015. Freiburg, Germany. BS 07– Micro- / nanofabrication for MEMS II [BS07-2] Procedia Engineering, 2015, vol. 120, p. 215-219 |
| URI: | http://hdl.handle.net/2445/103303 |
| Related resource: | http://doi.org/10.1016/j.proeng.2015.08.614 |
| ISSN: | 1877-7058 |
| Appears in Collections: | Comunicacions a congressos (Enginyeria Electrònica i Biomèdica) Publicacions de projectes de recerca finançats per la UE |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| 1-s2.0-S1877705815022778-main.pdf | 1 MB | Adobe PDF | View/Open |
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