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http://hdl.handle.net/2445/127307
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DC Field | Value | Language |
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dc.contributor.author | Samà Monsonís, Jordi | - |
dc.contributor.author | Domènech Gil, Guillem | - |
dc.contributor.author | Gracia, Isabel | - |
dc.contributor.author | Borrisé, Xavier | - |
dc.contributor.author | Cané i Ballart, Carles | - |
dc.contributor.author | Barth, Sven | - |
dc.contributor.author | Steib, Frederik | - |
dc.contributor.author | Waag, Andreas | - |
dc.contributor.author | Prades García, Juan Daniel | - |
dc.contributor.author | Romano Rodríguez, Albert | - |
dc.date.accessioned | 2019-01-15T16:05:15Z | - |
dc.date.available | 2021-01-09T06:10:14Z | - |
dc.date.issued | 2019-01-09 | - |
dc.identifier.issn | 0925-4005 | - |
dc.identifier.uri | http://hdl.handle.net/2445/127307 | - |
dc.description.abstract | A methodology based on the use of Electron Beam Lithography for contacting individual nanowires on top of non-flat micromembranes and microhotplates has been implemented, and the practical details have been exhaustively described. The different fabrication steps have been adapted to the substrate's topology, requiring specific holders and conditions. The methodology is demonstrated on individual SnO2 nanowires, which, after fabrication, have been characterized as functional resistive gas nanosensors towards NH3 and benchmarked against similar devices fabricated using more conventional Dual Beam Focused Ion Beam techniques, demonstrating the superior properties of the here presented methodology, which can be further extended to other non-conventional suspended substrates and nanomaterials. | - |
dc.format.mimetype | application/pdf | - |
dc.language.iso | eng | - |
dc.publisher | Elsevier B.V. | - |
dc.relation.isformatof | Versió postprint del document publicat a: https://doi.org/10.1016/j.snb.2019.01.040 | - |
dc.relation.ispartof | Sensors and Actuators B-Chemical, 2019, vol. 286, p. 616-623 | - |
dc.relation.uri | https://doi.org/10.1016/j.snb.2019.01.040 | - |
dc.rights | cc-by-nc-nd (c) Elsevier B.V., 2019 | - |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/es | - |
dc.source | Articles publicats en revistes (Enginyeria Electrònica i Biomèdica) | - |
dc.subject.classification | Detectors de gasos | - |
dc.subject.classification | Feixos electrònics | - |
dc.subject.classification | Nanoestructures | - |
dc.subject.other | Gas detectors | - |
dc.subject.other | Electron beams | - |
dc.subject.other | Nanostructures | - |
dc.title | Electron beam lithography for contacting single nanowires on non-flat suspended substrates | - |
dc.type | info:eu-repo/semantics/article | - |
dc.type | info:eu-repo/semantics/acceptedVersion | - |
dc.identifier.idgrec | 684208 | - |
dc.date.updated | 2019-01-15T16:05:15Z | - |
dc.relation.projectID | info:eu-repo/grantAgreement/EC/FP7/336917/EU//BETTERSENSE | - |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | - |
Appears in Collections: | Articles publicats en revistes (Enginyeria Electrònica i Biomèdica) Publicacions de projectes de recerca finançats per la UE |
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684208.pdf | 2.02 MB | Adobe PDF | View/Open |
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