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Title: Numerical algorithm for spectroscopic ellipsometry of thick transparent films
Author: Bosch i Puig, Salvador
Pérez Tudela, Julio D.
Canillas i Biosca, Adolf
Keywords: El·lipsometria
Anàlisi numèrica
Numerical analysis
Issue Date: 1998
Publisher: Optical Society of America
Abstract: We present a numerical method for spectroscopic ellipsometry of thick transparent films. When an analytical expression for the dispersion of the refractive index (which contains several unknown coefficients) is assumed, the procedure is based on fitting the coefficients at a fixed thickness. Then the thickness is varied within a range (according to its approximate value). The final result given by our method is as follows: The sample thickness is considered to be the one that gives the best fitting. The refractive index is defined by the coefficients obtained for this thickness.
It is part of: Applied Optics, 1998, vol. 37, p. 1177-1179
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ISSN: 0003-6935
Appears in Collections:Articles publicats en revistes (Física Aplicada)

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