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Title: Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components
Author: Duparré, Angela
Ferré Borrull, Josep
Gliech, Stefan
Notni, Gunther
Steinert, Jörg
Bennett, Jean M.
Keywords: Òptica electrònica
Electron optics
Issue Date: 2001
Publisher: Optical Society of America
Abstract: Surface topography and light scattering were measured on 15 samples ranging from those having smooth surfaces to others with ground surfaces. The measurement techniques included an atomic force microscope, mechanical and optical profilers, confocal laser scanning microscope, angle-resolved scattering, and total scattering. The samples included polished and ground fused silica, silicon carbide, sapphire, electroplated gold, and diamond-turned brass. The measurement instruments and techniques had different surface spatial wavelength band limits, so the measured roughnesses were not directly comparable. Two-dimensional power spectral density (PSD) functions were calculated from the digitized measurement data, and we obtained rms roughnesses by integrating areas under the PSD curves between fixed upper and lower band limits. In this way, roughnesses measured with different instruments and techniques could be directly compared. Although smaller differences between measurement techniques remained in the calculated roughnesses, these could be explained mostly by surface topographical features such as isolated particles that affected the instruments in different ways.
Note: Reproducció del document publicat a:
It is part of: Applied Optics, 2001, vol. 41, núm. 1, p. 154-171
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ISSN: 0003-6935
Appears in Collections:Articles publicats en revistes (Física Aplicada)

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