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Title: Procedure to characterize microroughness of optical thin films: application to ion-beam-sputtered vacuum-ultraviolet coatings
Author: Ferré Borrull, Josep
Duparré, Angela
Quesnel, Etienne
Keywords: Òptica electrònica
Electron optics
Issue Date: 2001
Publisher: Optical Society of America
Abstract: A method for characterizing the microroughness of samples in optical coating technology is developed. Measurements over different spatial-frequency ranges are composed into a single power spectral density (PSD) covering a large bandwidth. This is followed by the extraction of characteristic parameters through fitting of the PSD to a suitable combination of theoretical models. The method allows us to combine microroughness measurements performed with different techniques, and the fitting procedure can be adapted to any behavior of a combined PSD. The method has been applied to a set of ion-beam-sputtered fluoride vacuum-UV coatings with increasing number of alternative low- and high-index layers. Conclusions about roughness development and microstructural growth are drawn.
Note: Reproducció del document publicat a:
It is part of: Applied Optics, 2001, vol. 40, núm. 13, p. 2190-2199
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ISSN: 0003-6935
Appears in Collections:Articles publicats en revistes (Física Aplicada)

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