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Title: Plasma parameters of pulsed-dc discharges in methane used to deposit diamondlike carbon films
Author: Corbella Roca, Carles
Rubio Roy, Miguel
Bertrán Serra, Enric
Andújar Bella, José Luis
Keywords: Metà
Pel·lícules fines
Revestiments protectors
Aplicacions industrials
Plasma (Gasos ionitzats)
Thin films
Protective coatings
Industrial applications
Plasma (Ionized gases)
Issue Date: 5-Aug-2009
Publisher: American Institute of Physics
Abstract: Here we approximate the plasma kinetics responsible for diamondlike carbon (DLC) depositions that result from pulsed-dc discharges. The DLC films were deposited at room temperature by plasma-enhanced chemical vapor deposition (PECVD) in a methane (CH4) atmosphere at 10 Pa. We compared the plasma characteristics of asymmetric bipolar pulsed-dc discharges at 100 kHz to those produced by a radio frequency (rf) source. The electrical discharges were monitored by a computer-controlled Langmuir probe operating in time-resolved mode. The acquisition system provided the intensity-voltage (I-V) characteristics with a time resolution of 1 μs. This facilitated the discussion of the variation in plasma parameters within a pulse cycle as a function of the pulse waveform and the peak voltage. The electron distribution was clearly divided into high- and low-energy Maxwellian populations of electrons (a bi-Maxwellian population) at the beginning of the negative voltage region of the pulse. We ascribe this to intense stoc...
Note: Reproducció del document publicat a:
It is part of: Journal of Applied Physics, 2009, vol. 106, núm. 3, p. 033302
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ISSN: 0021-8979
Appears in Collections:Articles publicats en revistes (Física Aplicada)

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