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http://hdl.handle.net/2445/25058
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DC Field | Value | Language |
---|---|---|
dc.contributor.author | Canillas i Biosca, Adolf | cat |
dc.contributor.author | Pascual Miralles, Esther | cat |
dc.contributor.author | Drévillon, B. | cat |
dc.date.accessioned | 2012-05-08T08:09:12Z | - |
dc.date.available | 2012-05-08T08:09:12Z | - |
dc.date.issued | 1993-08 | - |
dc.identifier.issn | 0034-6748 | - |
dc.identifier.uri | http://hdl.handle.net/2445/25058 | - |
dc.description.abstract | A new Fourier transform infrared phase‐modulated ellipsometer is presented. It combines the high frequency provided by a photoelastic modulator (37 kHz) with the low frequency of the Fourier transform infrared spectroscopy (<1 kHz), by means of a numerical data acquisition system. A full spectrum recording (from 900 to 4000 cm−1) can be achieved in 2 s. Thus, it allows its adaptation for kinetic in situ studies. The optical setup and the data reduction procedure are presented. In particular, a self‐consistent spectral calibration procedure is described in detail. The precision in Ψ and Δ increases from 0.3° to 0.02° when increasing the integration time from 2 to 760 s. The examples shown in this article illustrate the high sensitivity to identify and analyze the absorption vibration variations of ultrathin films (a few angstroms thick). | - |
dc.format.extent | 7 p. | - |
dc.format.mimetype | application/pdf | - |
dc.language.iso | eng | eng |
dc.publisher | American Institute of Physics | - |
dc.relation.isformatof | Reproducció del document publicat a: http://dx.doi.org/10.1063/1.1143953 | - |
dc.relation.ispartof | Review of Scientific Instruments, 1993, vol. 64, num. 8, p. 2153-2159 | - |
dc.relation.uri | http://dx.doi.org/10.1063/1.1143953 | - |
dc.rights | (c) American Institute of Physics, 1993 | - |
dc.source | Articles publicats en revistes (Física Aplicada) | - |
dc.subject.classification | El·lipsometria | cat |
dc.subject.classification | Fourier transformations | cat |
dc.subject.classification | Espectroscòpia infraroja | cat |
dc.subject.classification | Pel·lícules fines | cat |
dc.subject.other | Ellipsometry | eng |
dc.subject.other | Fourier transformations | eng |
dc.subject.other | Infrared spectroscopy | eng |
dc.subject.other | Thin films | eng |
dc.title | Phase-modulated ellipsometer using a Fourier transform infrared spectrometer for real time applications | eng |
dc.type | info:eu-repo/semantics/article | - |
dc.type | info:eu-repo/semantics/publishedVersion | - |
dc.identifier.idgrec | 71316 | - |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | - |
Appears in Collections: | Articles publicats en revistes (Física Aplicada) |
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