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Title: Alloy inhomogeneities in InAlAs strained layers grown by MBE
Author: Peiró Martínez, Francisca
Cornet i Calveras, Albert
Morante i Lleonart, Joan Ramon
Clark, S. A.
Williams, R. H.
Keywords: Microscòpia electrònica
Pel·lícules fines
Feixos moleculars
Electron microscopy
Thin films
Molecular beams
Issue Date: 1992
Publisher: American Institute of Physics
Abstract: Transmission electron microscopy studies have been performed to characterize InxAl1−xAs layers grown by molecular beam epitaxy on (100) InP substrates. The first observations of compositional nonuniformities in strained InAlAs layers are reported. The coarse quasiperiodic structure present in each sample has been found to be dependent upon the growth parameters and the sample characteristics.
Note: Reproducció del document publicat a:
It is part of: Journal of Applied Physics, 1992, vol. 71, num. 5, p. 2470-2472
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ISSN: 0021-8979
Appears in Collections:Articles publicats en revistes (Enginyeria Electrònica i Biomèdica)

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