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Title: Optical absorption and graphitic clusters of hydrogenated amorphophous carbon thin films
Author: Pascual Miralles, Esther
Serra Rodríguez, Carmen
Bertrán Serra, Enric
Keywords: Carboni
Pel·lícules fines
Thin films
Issue Date: 1991
Publisher: American Institute of Physics
Abstract: The optical absorption of hydrogenated amorphous carbon films (a‐C:H) was measured by spectroscopic ellipsometry. The a‐C:H films were deposited at different substrate temperatures by rf‐plasma of methane. A volume distribution of graphitic cluster size was assumed to reproduce the experimental spectra of the absorption coefficient. The changes in the absorption coefficient and the optical gap, induced by deposition temperature, have been interpreted in terms of changes in the graphitic cluster size of the network. The increase in the deposition temperature produces an increase in the size of the graphitic clusters.
Note: Reproducció del document publicat a:
It is part of: Journal of Applied Physics, 1991, vol. 70, num. 9, p. 5119-5121
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ISSN: 0021-8979
Appears in Collections:Articles publicats en revistes (Física Aplicada)

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