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Title: SiC-Based MIS gas sensor for high water vapor environments
Author: Casals Guillén, Olga
Becker, Thomas
Godignon, Philippe
Romano Rodríguez, Albert
Keywords: Detectors de gasos
Piles de combustible
Gas detectors
Fuel cells
Issue Date: 1-Mar-2012
Publisher: Elsevier B.V.
Abstract: In this work we will prove that SiC-based MIS capacitors can work in environments with extremely high concentrations of water vapor and still be sensitive to hydrogen, CO and hydrocarbons, making these devices suitable for monitoring the exhaust gases of hydrogen or hydrocarbons based fuel cells. Under the harshest conditions (45% of water vapor by volume ratio to nitrogen), Pt/TaOx/SiO2/SiC MIS capacitors are able to detect the presence of 1 ppm of hydrogen, 2 ppm of CO, 100 ppm of ethane or 20 ppm of ethene, concentrations that are far below the legal permissible exposure limits.
Note: Versió postprint del document publicat a: 10.1016/j.snb.2011.12.032
It is part of: Sensors and Actuators B-Chemical, 2012, vol. 164, num. 1, p. 101-105
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ISSN: 0925-4005
Appears in Collections:Articles publicats en revistes (Enginyeria Electrònica i Biomèdica)

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