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http://hdl.handle.net/2445/98754
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DC Field | Value | Language |
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dc.contributor.author | Fontcuberta i Morral, A. | - |
dc.contributor.author | Bertomeu i Balagueró, Joan | - |
dc.contributor.author | Roca i Cabarrocas, P. (Pere) | - |
dc.date.accessioned | 2016-05-23T13:50:00Z | - |
dc.date.available | 2016-05-23T13:50:00Z | - |
dc.date.issued | 2000 | - |
dc.identifier.issn | 0921-5107 | - |
dc.identifier.uri | http://hdl.handle.net/2445/98754 | - |
dc.description.abstract | The growth mechanisms of microcrystalline silicon thin films at low temperatures (100-250°C) by plasma CVD are still a matter of debate. We have shown that ue-Si:H formation proceeds through four phases (incubation, nucleation, growth and steady state) and that hydrogen plays a key role in this process, particularly during the incubation phase in which hydrogen modifies the amorphous silicon network and forms a highly porous phase where nucleation takes place. In this study we combine in-situ ellipsometry and dark conductivity measurements with ex-situ high resolution transmission electron microscopy to improve our understanding of microcrystalline silicon formation. | - |
dc.format.extent | 5 p. | - |
dc.format.mimetype | application/pdf | - |
dc.language.iso | eng | - |
dc.publisher | Elsevier B.V. | - |
dc.relation.isformatof | Versió postprint del document publicat a: http://dx.doi.org/10.1016/S0921-5107(99)00324-4 | - |
dc.relation.ispartof | Materials Science and Engineering B-Solid State Materials for Advanced Technology, 2000, vol. 69-70, p. 559-563 | - |
dc.relation.uri | http://dx.doi.org/10.1016/S0921-5107(99)00324-4 | - |
dc.rights | (c) Elsevier B.V., 2000 | - |
dc.source | Articles publicats en revistes (Física Aplicada) | - |
dc.subject.classification | Silici | - |
dc.subject.classification | Hidrogen | - |
dc.subject.classification | Temperatures baixes | - |
dc.subject.classification | Pel·lícules fines | - |
dc.subject.other | Silicon | - |
dc.subject.other | Hydrogen | - |
dc.subject.other | Low temperatures | - |
dc.subject.other | Thin films | - |
dc.title | The role of hydrogen in the formation of microcrystalline silicon | - |
dc.type | info:eu-repo/semantics/article | - |
dc.type | info:eu-repo/semantics/acceptedVersion | - |
dc.identifier.idgrec | 147813 | - |
dc.date.updated | 2016-05-11T16:58:30Z | - |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | - |
Appears in Collections: | Articles publicats en revistes (Física Aplicada) |
Files in This Item:
File | Description | Size | Format | |
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147813.pdf | 384.07 kB | Adobe PDF | View/Open |
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