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| Issue Date | Title | Author(s) |
|---|---|---|
| 2007 | Residual Stress Measurement on a MEMS Structure With High-Spatial Resolution | Sabaté Vizcarra, Neus; Vogel, Dietmar; Gollhardt, Astrid; Keller, Jürgen; Cané i Ballart, Carles; Gràcia Tortadés, Isabel; Morante i Lleonart, Joan Ramon; Michel, Bernd |
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- 1 2007