# name
Locally grown SnO2 NWs as low power ammonia sensor

# metadata.dc.description.abstract[].value
Localized growth of SnO2 nanowires on top of CMOS compatible micromembranes that incorporate a buried heater and prepatterned interdigitated electrodes has been achieved that presents the advantage that it allows to easily and directly integrate the advantageous properties of quasi-one dimensional structures in an advanced electronic device by a Vapor Liquid Solid (VLS) mechanism. A NWs based sensor of this type is characterized as a low power gas sensor towards NH3 at different temperatures. Stable and reproducible response is obtained, that allows detecting concentrations below the time-weighted average exposure limit for 8 h.

# metadata.dc.relation.ispartof[].value
Comunicació presentada a: Eurosensors 2015 Conference, XXIX edition. September 6 to 9, 2015. Freiburg, Germany. BS 07– Micro- / nanofabrication for MEMS II [BS07-2]

# metadata.dc.source[].value
Comunicacions a congressos (Enginyeria Electrònica i Biomèdica)

# metadata.dc.title[].value
Locally grown SnO2 NWs as low power ammonia sensor