# metadata.dc.description.abstract[].value
Nanomechanical resonators can serve as ultrasensitive,miniaturized force probes. While vertical structures such as nanopillarsare ideal for this purpose, transducing their motion is challenging. Pillar-based photonic crystals (PhCs) offer a potential solution by integratingoptical transduction within the pillars. However, achieving high-qualityPhCs is hindered by inefficient vertical light confinement. Here, wepresent a full-silicon photonic crystal cavity based on nanopillars as aplatform for applications in force sensing and biosensing areas. Its unit cellconsists of a silicon pillar with a larger diameter at its top portion than atthe bottom, which allows vertical light confinement and an energy bandgap in the near-infrared range for transverse-magnetic polarization. Weexperimentally demonstrate optical cavities with Q factors exceeding 1e3,constructed by inserting a defect within a periodic arrangement of thistype of pillars. Each nanopillar naturally behaves as a nanomechanicalcantilever, making the fabricated geometries excellent optomechanical (OM) photonic crystal cavities in which the mechanicalmotion of each nanopillar composing the cavity can be optically transduced. These geometries display enhanced mechanicalproperties, cost-effectiveness, integration possibilities, and scalability. They also present an alternative in front of the widelyused suspended Si beam OM cavities made on silicon-on-insulator substrates.

# metadata.dc.rights[].value
cc by (c) Jaramillo Fernández, Juliana et al., 2024

# metadata.dc.source[].value
Articles publicats en revistes (Enginyeria Electrònica i Biomèdica)