Canillas i Biosca, AdolfPascual Miralles, EstherDrévillon, B.2012-05-082012-05-081993-080034-6748https://hdl.handle.net/2445/25058A new Fourier transform infrared phase‐modulated ellipsometer is presented. It combines the high frequency provided by a photoelastic modulator (37 kHz) with the low frequency of the Fourier transform infrared spectroscopy (<1 kHz), by means of a numerical data acquisition system. A full spectrum recording (from 900 to 4000 cm−1) can be achieved in 2 s. Thus, it allows its adaptation for kinetic in situ studies. The optical setup and the data reduction procedure are presented. In particular, a self‐consistent spectral calibration procedure is described in detail. The precision in Ψ and Δ increases from 0.3° to 0.02° when increasing the integration time from 2 to 760 s. The examples shown in this article illustrate the high sensitivity to identify and analyze the absorption vibration variations of ultrathin films (a few angstroms thick).7 p.application/pdfeng(c) American Institute of Physics, 1993El·lipsometriaFourier transformationsEspectroscòpia infrarojaPel·lícules finesEllipsometryFourier transformationsInfrared spectroscopyThin filmsinfo:eu-repo/semantics/article71316info:eu-repo/semantics/openAccess