Locally grown SnO2 NWs as low power ammonia sensor

Samà Monsonís, JordiBarth, SvenJiménez Díaz, RománPrades García, Juan DanielCasals Guillén, OlgaGràcia Tortadés, IsabelCané i Ballart, CarlesRomano Rodríguez, Albert2016-11-042016-11-042015-09-111877-7058https://hdl.handle.net/2445/103303Localized growth of SnO2 nanowires on top of CMOS compatible micromembranes that incorporate a buried heater and prepatterned interdigitated electrodes has been achieved that presents the advantage that it allows to easily and directly integrate the advantageous properties of quasi-one dimensional structures in an advanced electronic device by a Vapor Liquid Solid (VLS) mechanism. A NWs based sensor of this type is characterized as a low power gas sensor towards NH3 at different temperatures. Stable and reproducible response is obtained, that allows detecting concentrations below the time-weighted average exposure limit for 8 h.5 p.application/pdfengCC BY-NC-ND, (c) Samà et al., 2015http://creativecommons.org/licenses/by-nc-nd/4.0/AmoníacDetectors de gasosAmmoniaGas detectorsLocally grown SnO2 NWs as low power ammonia sensorinfo:eu-repo/semantics/conferenceObjectinfo:eu-repo/semantics/openAccess