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Title: Ion-beam synthesis of amorphous SiC films: Structural analysis and recrystallization
Author: Serre, Christophe
Calvo Barrio, Lorenzo
Pérez Rodríguez, Alejandro
Romano Rodríguez, Alberto
Morante i Lleonart, Joan Ramon
Pacaud, Y.
Kögler, Reinhard
Heera, Viton
Skorupa, Wolfgang
Keywords: Implantació d'ions
Ion implantation
Issue Date: 1-May-1996
Publisher: American Institute of Physics
Note: Reproducció del document publicat a:
It is part of: Journal of Applied Physics, 1996, vol. 79, núm. 9, p. 6907-6913
Related resource:
ISSN: 0021-8979
Appears in Collections:Articles publicats en revistes (Electrònica)

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