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Title: Reconstruction of the SiO2 structure damaged by low-energy Ar-implanted ions
Author: Garrido Fernández, Blas
Samitier i Martí, Josep
Bota Ferragut, Sebastián Antonio
Moreno, J. A.
Montserrat i Martí, Josep
Morante i Lleonart, Joan Ramon
Keywords: Implantació d'ions
Spectrum analysis
Ion implantation
Issue Date: 1-Dec-1984
Publisher: American Institute of Physics
Note: Reproducció del document publicat a:
It is part of: Journal of Applied Physics, 1997, vol. 81, núm. 1, p. 126-134
Related resource:
ISSN: 0021-8979
Appears in Collections:Articles publicats en revistes (Electrònica)

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