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Title: Phase-modulated ellipsometer using a Fourier transform infrared spectrometer for real time applications
Author: Canillas i Biosca, Adolf
Pascual Miralles, Esther
Drévillon, B.
Keywords: El·lipsometria
Fourier transformations
Espectroscòpia infraroja
Pel·lícules fines
Fourier transformations
Infrared spectroscopy
Thin films
Issue Date: Aug-1993
Publisher: American Institute of Physics
Note: Reproducció del document publicat a:
It is part of: Review of Scientific Instruments, 1993, vol. 64, num. 8, p. 2153-2159
Related resource:
ISSN: 0034-6748
Appears in Collections:Articles publicats en revistes (Física Aplicada)

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