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http://hdl.handle.net/2445/25086
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DC Field | Value | Language |
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dc.contributor.author | Gomila Lluch, Gabriel | cat |
dc.contributor.author | Toset Gilabert, Jorge | cat |
dc.contributor.author | Fumagalli, Laura, 1959- | cat |
dc.date.accessioned | 2012-05-08T09:07:34Z | - |
dc.date.available | 2012-05-08T09:07:34Z | - |
dc.date.issued | 2008-07-25 | - |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.uri | http://hdl.handle.net/2445/25086 | - |
dc.description.abstract | We present an analytical model to interpret nanoscale capacitance microscopy measurements on thin dielectric films. The model displays a logarithmic dependence on the tip-sample distance and on the film thickness-dielectric constant ratio and shows an excellent agreement with finite-element numerical simulations and experimental results on a broad range of values. Based on these results, we discuss the capabilities of nanoscale capacitance microscopy for the quantitative extraction of the dielectric constant and the thickness of thin dielectric films at the nanoscale. | eng |
dc.format.extent | 8 p. | - |
dc.format.mimetype | application/pdf | - |
dc.language.iso | eng | eng |
dc.publisher | American Institute of Physics | - |
dc.relation.isformatof | Reproducció del document publicat a: http://dx.doi.org/10.1063/1.2957069 | - |
dc.relation.ispartof | Journal of Applied Physics, 2008, vol. 104, núm. 2, p. 024315 | - |
dc.relation.uri | http://dx.doi.org/10.1063/1.2957069 | - |
dc.rights | (c) American Institute of Physics, 2008 | - |
dc.source | Articles publicats en revistes (Enginyeria Electrònica i Biomèdica) | - |
dc.subject.classification | Dielèctrics | cat |
dc.subject.classification | Nanotecnologia | cat |
dc.subject.other | Dielectrics | eng |
dc.subject.other | Nanotechnology | eng |
dc.title | Nanoscale capacitance microscopy of thin dielectric films | eng |
dc.type | info:eu-repo/semantics/article | - |
dc.type | info:eu-repo/semantics/publishedVersion | - |
dc.identifier.idgrec | 561608 | - |
dc.date.updated | 2012-04-20T11:47:48Z | - |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | - |
Appears in Collections: | Articles publicats en revistes (Enginyeria Electrònica i Biomèdica) Articles publicats en revistes (Institut de Bioenginyeria de Catalunya (IBEC)) |
Files in This Item:
File | Description | Size | Format | |
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561608.pdf | 513.25 kB | Adobe PDF | View/Open |
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