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http://hdl.handle.net/2445/32218
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DC Field | Value | Language |
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dc.contributor.author | De Wolf, I. | - |
dc.contributor.author | Vanhellemont, J. | - |
dc.contributor.author | Romano Rodríguez, Albert | - |
dc.contributor.author | Norström, H. | - |
dc.contributor.author | Maes, H. E. | - |
dc.date.accessioned | 2012-10-08T11:57:11Z | - |
dc.date.available | 2012-10-08T11:57:11Z | - |
dc.date.issued | 1992 | - |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.uri | http://hdl.handle.net/2445/32218 | - |
dc.description.abstract | Stress in local isolation structures is studied by micro‐Raman spectroscopy. The results are correlated with predictions of an analytical model for the stress distribution and with cross‐sectional transmission electron microscopy observations. The measurements are performed on structures on which the Si3N4 oxidation mask is still present. The influence of the pitch of the periodic local isolation pattern, consisting of parallel lines, the thickness of the mask, and the length of the bird"s beak on the stress distribution are studied. It is found that compressive stress is present in the Si substrate under the center of the oxidation mask lines, with a magnitude dependent on the width of the lines. Large tensile stress is concentrated under the bird"s beak and is found to increase with decreasing length of the bird"s beak and with increasing thickness of the Si3N4 film. | - |
dc.format.extent | 9 p. | - |
dc.format.mimetype | application/pdf | - |
dc.language.iso | eng | - |
dc.publisher | American Institute of Physics | - |
dc.relation.isformatof | Reproducció del document publicat a: http://dx.doi.org/10.1063/1.351311 | - |
dc.relation.ispartof | Journal of Applied Physics, 1992, vol. 71, num. 2, p. 898-906 | - |
dc.relation.uri | http://dx.doi.org/10.1063/1.351311 | - |
dc.rights | (c) American Institute of Physics , 1992 | - |
dc.source | Articles publicats en revistes (Enginyeria Electrònica i Biomèdica) | - |
dc.subject.classification | Pel·lícules fines | - |
dc.subject.classification | Química física | - |
dc.subject.other | Thin films | - |
dc.subject.other | Physical and theoretical chemistry | - |
dc.title | Micro-Raman study of stress distribution in local isolation structures and correlation with transmission electron microscopy | eng |
dc.type | info:eu-repo/semantics/article | - |
dc.type | info:eu-repo/semantics/publishedVersion | - |
dc.identifier.idgrec | 051464 | - |
dc.date.updated | 2012-10-08T11:57:11Z | - |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | - |
Appears in Collections: | Articles publicats en revistes (Enginyeria Electrònica i Biomèdica) |
Files in This Item:
File | Description | Size | Format | |
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051464.pdf | 1.28 MB | Adobe PDF | View/Open |
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