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Title: Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices
Author: Oria, Roger
Otero Díaz, Jorge
González Claramonte, Laura
Botaya Turón, Luis
Carmona Flores, Manuel
Puig i Vidal, Manuel
Keywords: Nanotecnologia
Microscòpia de força atòmica
Atomic force microscopy
Issue Date: 29-Apr-2013
Publisher: MDPI Publishing
Abstract: Quartz Tuning Fork (QTF)-based Scanning Probe Microscopy (SPM) is an important field of research. A suitable model for the QTF is important to obtain quantitative measurements with these devices. Analytical models have the limitation of being based on the double cantilever configuration. In this paper, we present an electromechanical finite element model of the QTF electrically excited with two free prongs. The model goes beyond the state-of-the-art of numerical simulations currently found in the literature for this QTF configuration. We present the first numerical analysis of both the electrical and mechanical behavior of QTF devices. Experimental measurements obtained with 10 units of the same model of QTF validate the finite element model with a good agreement.
Note: Reproducció del document publicat a:
It is part of: Sensors, 2013, vol. 13, p. 7156-7169
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ISSN: 1424-8220
Appears in Collections:Articles publicats en revistes (Electrònica)

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