Please use this identifier to cite or link to this item: http://hdl.handle.net/2445/48249
Title: Anisotropic surface properties of micro/nanostructured a-C:H:F thin films with self-assembly applications
Author: Freire Soler, Víctor Manuel
Corbella Roca, Carles
Bertrán Serra, Enric
Portal-Marco, S.
Rubio-Roy, M.
Andújar Bella, José Luis
Keywords: Carboni
Pel·lícules fines
Microelectrònica
Anisotropia
Nanopartícules
Materials biomèdics
Carbon
Thin films
Microelectronics
Anisotropy
Nanoparticles
Biomedical materials
Issue Date: 2012
Publisher: American Institute of Physics
Abstract: The singular properties of hydrogenated amorphous carbon (a-C:H) thin filmsdeposited by pulsed DC plasma enhanced chemical vapor deposition (PECVD), such as hardness and wear resistance, make it suitable as protective coating with low surface energy for self-assembly applications. In this paper, we designed fluorine-containing a-C:H (a-C:H:F) nanostructured surfaces and we characterized them for self-assembly applications. Sub-micron patterns were generated on silicon through laser lithography while contact angle measurements, nanotribometer, atomic force microscopy (AFM), and scanning electron microscopy (SEM) were used to characterize the surface. a-C:H:F properties on lithographied surfaces such as hydrophobicity and friction were improved with the proper relative quantity of CH4 and CHF3 during deposition, resulting in ultrahydrophobic samples and low friction coefficients. Furthermore, these properties were enhanced along the direction of the lithographypatterns (in-plane anisotropy). Finally, self-assembly properties were tested with silicananoparticles, which were successfully assembled in linear arrays following the generated patterns. Among the main applications, these surfaces could be suitable as particle filter selector and cell colony substrate.
Note: Reproducció del document publicat a: http://dx.doi.org/10.1063/1.4730783
It is part of: Journal of Applied Physics, 2012, vol. 111, p. 124323-12431
Related resource: http://dx.doi.org/10.1063/1.4730783
URI: http://hdl.handle.net/2445/48249
ISSN: 0021-8979
Appears in Collections:Articles publicats en revistes (Física Aplicada)

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