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Title: Vertically aligned carbon nanotubes for microelectrode arrays applications
Author: Castro Smirnov, J. R.
Jover, Eric
Amade Rovira, Roger
Gabriel, Gemma
Villa, Rosa
Bertrán Serra, Enric
Keywords: Materials nanoestructurats
Pel·lícules fines
Nanostructured materials
Thin films
Issue Date: 2012
Publisher: American Scientific Publishers
Abstract: In this work a methodology to fabricate carbon nanotube based electrodes using plasma enhanced chemical vapour deposition has been explored and defined. The final integrated microelectrode based devices should present specific properties that make them suitable for microelectrode arrays applications. The methodology studied has been focused on the preparation of highly regular and dense vertically aligned carbon nanotube (VACNT) mat compatible with the standard lithography used for microelectrode arrays technology.
Note: Reproducció del document publicat a:
It is part of: Journal of Nanoscience and Nanotechnology, 2012, vol. 12, num. 9, p. 6941-6947
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ISSN: 1533-4880
Appears in Collections:Articles publicats en revistes (Física Aplicada)

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