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Title: | Diffraction grating couplers milled in Si3N4 rib waveguides with a focused ion beam |
Author: | Zinoviev, K. Domínguez, Carlos (Domínguez Horna) Vilà i Arbonès, Anna Maria |
Keywords: | Nanotecnologia Xarxes de difracció Guies d'ones Nanotechnology Diffraction gratings Wave guides |
Issue Date: | 2005 |
Publisher: | Optical Society of America |
Abstract: | Focused ion beam milling is a processing technology which allows flexible direct writing of nanometer scale features efficiently substituting electron beam lithography. No mask need results in ability for patterns writing even on fragile micromechanical devices. In this work we studied the abilities of the tool for fabrication of diffraction grating couplers in silicon nitride waveguides. The gratings were fabricated on a chip with extra fragile cantilevers of sub micron thickness. Optical characterization of the couplers was done using excitation of the waveguides in visible range by focused Gaussian beams of different waist sizes. Influence of Ga+ implantation on the device performance was studied. |
Note: | Reproducció del document publicat a: http://dx.doi.org/10.1364/OPEX.13.008618 |
It is part of: | Optics Express, 2005, vol. 13, num. 21, p. 8618-8624 |
URI: | http://hdl.handle.net/2445/56643 |
Related resource: | http://dx.doi.org/10.1364/OPEX.13.008618 |
ISSN: | 1094-4087 |
Appears in Collections: | Articles publicats en revistes (Enginyeria Electrònica i Biomèdica) |
Files in This Item:
File | Description | Size | Format | |
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529369.pdf | 188.98 kB | Adobe PDF | View/Open |
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