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Title: Diffraction grating couplers milled in Si3N4 rib waveguides with a focused ion beam
Author: Zinoviev, K.
Domínguez, C.
Vilà i Arbonès, Anna Maria
Keywords: Nanotecnologia
Xarxes de difracció
Guies d'ones
Diffraction gratings
Wave guides
Issue Date: 2005
Publisher: Optical Society of America
Abstract: Focused ion beam milling is a processing technology which allows flexible direct writing of nanometer scale features efficiently substituting electron beam lithography. No mask need results in ability for patterns writing even on fragile micromechanical devices. In this work we studied the abilities of the tool for fabrication of diffraction grating couplers in silicon nitride waveguides. The gratings were fabricated on a chip with extra fragile cantilevers of sub micron thickness. Optical characterization of the couplers was done using excitation of the waveguides in visible range by focused Gaussian beams of different waist sizes. Influence of Ga+ implantation on the device performance was studied.
Note: Reproducció del document publicat a:
It is part of: Optics Express, 2005, vol. 13, num. 21, p. 8618-8624
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ISSN: 1094-4087
Appears in Collections:Articles publicats en revistes (Electrònica)

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