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Title: Design and characterization of thermally actuated bimetallic membranes by Michelson interferometry
Author: Duarte, J.E.
Fernández Morales, F.H.
Martín Badosa, Estela
Keywords: Interferometria
Mètode dels elements finits
Finite element method
Issue Date: 2011
Publisher: Universidad Nacional de Colombia
Abstract: This paper presents the design and characterization of thermally actuated Al-Si bimetallic membranes. The design was made with the Finite Element Method and was emphasized on optimizing the thickness ratio between the aluminum and silicon layers. The membrane deflection was measured employing the Michelson Interferometer. The experimental process was carried out with square membranes of 5 mm of side length, 10 mm in silicon thickness, and an aluminum thicknesses of 4 and 1 mm. A maximum deflection of 14 mm was obtained for membranes with 4 mm of aluminum thickness, which is consistent with predictions made by numerical calculations.
Note: Reproducció del document publicat a:
It is part of: DYNA, 2011, vol. 78, num. 166, p. 75-80
ISSN: 0012-7353
Appears in Collections:Articles publicats en revistes (Física Aplicada)

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