Please use this identifier to cite or link to this item:
http://hdl.handle.net/2445/127307| Title: | Electron beam lithography for contacting single nanowires on non-flat suspended substrates |
| Author: | Samà Monsonís, Jordi Domènech Gil, Guillem Gracia, Isabel Borrisé, Xavier Cané i Ballart, Carles Barth, Sven Steib, Frederik Waag, Andreas Prades García, Juan Daniel Romano Rodríguez, Albert |
| Keywords: | Detectors de gasos Feixos electrònics Nanoestructures Gas detectors Electron beams Nanostructures |
| Issue Date: | 9-Jan-2019 |
| Publisher: | Elsevier B.V. |
| Abstract: | A methodology based on the use of Electron Beam Lithography for contacting individual nanowires on top of non-flat micromembranes and microhotplates has been implemented, and the practical details have been exhaustively described. The different fabrication steps have been adapted to the substrate's topology, requiring specific holders and conditions. The methodology is demonstrated on individual SnO2 nanowires, which, after fabrication, have been characterized as functional resistive gas nanosensors towards NH3 and benchmarked against similar devices fabricated using more conventional Dual Beam Focused Ion Beam techniques, demonstrating the superior properties of the here presented methodology, which can be further extended to other non-conventional suspended substrates and nanomaterials. |
| Note: | Versió postprint del document publicat a: https://doi.org/10.1016/j.snb.2019.01.040 |
| It is part of: | Sensors and Actuators B-Chemical, 2019, vol. 286, p. 616-623 |
| URI: | http://hdl.handle.net/2445/127307 |
| Related resource: | https://doi.org/10.1016/j.snb.2019.01.040 |
| ISSN: | 0925-4005 |
| Appears in Collections: | Articles publicats en revistes (Enginyeria Electrònica i Biomèdica) Publicacions de projectes de recerca finançats per la UE |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 684208.pdf | 2.02 MB | Adobe PDF | View/Open |
This item is licensed under a
Creative Commons License
