Synthesis and integration of β-Ga2O3 nanowires on substrates with electrodes

Abstract

Monoclinic Ga2O3 nanowires (NWs) have been synthesised via chemical vapour deposition by the vapour-liquid-solid mechanism on Au-sputtered fused silica substrates with Cr/Pt integrated electrodes. The grown NWs have been structurally characterised by scanning electron microscopy and their electrical characteristics have been measured in atmospheres with varying relative humidity concentrations at room temperature, proving their sensing properties.