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Title: Fabrication and structural characterization of highly ordered sub-100-nm planar magnetic nanodot arrays over 1 cm2 coverage area
Author: Li, Chang-Peng
Roshchin, Igor V.
Batlle Gelabert, Xavier
Viret, Michel
Ott, Frédéric
Schuller, Ivan K.
Keywords: Alumini
Propietats magnètiques
Matèria condensada
Microscòpia electrònica d'escombratge
Magnetic properties
Condensed matter
Scanning electron microscopy
Issue Date: 2006
Publisher: American Institute of Physics
Abstract: Porous alumina masks are fabricated by anodization of aluminum films grown on both semiconducting and insulating substrates. For these self-assembled alumina masks, pore diameters and periodicities within the ranges of 10–130 and 20–200nm, respectively, can be controlled by varying anodization conditions. 20nm periodicities correspond to pore densities in excess of 1012 per square inch, close to the holy grail of media with 1Tbit∕in.2 density. With these alumina masks, ordered sub-100-nm planar ferromagnetic nanodot arrays covering over 1cm2 were fabricated by electron beam evaporation and subsequent mask lift-off. Moreover, exchange-biased bilayer nanodots were fabricated using argon-ion milling. The average dot diameter and periodicity are tuned between 25 and 130nm and between 45 and 200nm, respectively. Quantitative analyses of scanning electron microscopy (SEM) images of pore and dot arrays show a high degree of hexagonal ordering and narrow size distributions. The dot periodicity obtained from grazi...
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It is part of: Journal of Applied Physics, 2006, vol. 100, p. 074318-1-074318-7
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ISSN: 0021-8979
Appears in Collections:Articles publicats en revistes (Física de la Matèria Condensada)

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