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Title: Low-loss rib waveguides containing Si nanocrystals embedded in SiO2
Author: Pellegrino, Paolo
Garrido Fernández, Blas
García Favrot, Cristina
Arbiol i Cobos, Jordi
Morante i Lleonart, Joan Ramon
Melchiorri, Mirko
Daldosso, Nicola
Pavesi, Lorenzo
Scheid, E.
Sarrabayrouse, G.
Keywords: Òptica
Ciència dels materials
Materials science
Issue Date: 25-Mar-2005
Publisher: American Institute of Physics
Abstract: We report on the study and modeling of the structural and optical properties of rib-loaded waveguides working in the 600-900-nm spectral range. A Si nanocrystal (Si-nc) rich SiO2 layer with nominal Si excess ranging from 10% to 20% was produced by quadrupole ion implantation of Si into thermal SiO2 formed on a silicon substrate. Si-ncs were precipitated by annealing at 1100°C, forming a 0.4-um-thick core layer in the waveguide. The Si content, the Si-nc density and size, the Si-nc emission, and the active layer effective refractive index were determined by dedicated experiments using x-ray photoelectron spectroscopy, Raman spectroscopy, energy-filtered transmission electron microscopy, photoluminescence and m-lines spectroscopy. Rib-loaded waveguides were fabricated by photolithographic and reactive ion etching processes, with patterned rib widths ranging from 1¿to¿8¿¿m. Light propagation in the waveguide was observed and losses of 11dB/cm at 633 and 780 nm were measured, modeled and interpreted.
Note: Reproducció del document publicat a:
It is part of: Journal of Applied Physics, 2005, vol. 97, núm. 7, p. 074312/1-074312/8
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ISSN: 0021-8979
Appears in Collections:Articles publicats en revistes (Enginyeria Electrònica i Biomèdica)

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