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http://hdl.handle.net/2445/24824
Title: | Low-loss rib waveguides containing Si nanocrystals embedded in SiO2 |
Author: | Pellegrino, Paolo Garrido Fernández, Blas García Favrot, Cristina Arbiol i Cobos, Jordi Morante i Lleonart, Joan Ramon Melchiorri, Mirko Daldosso, Nicola Pavesi, Lorenzo Scheid, E. Sarrabayrouse, G. |
Keywords: | Òptica Ciència dels materials Optics Materials science |
Issue Date: | 25-Mar-2005 |
Publisher: | American Institute of Physics |
Abstract: | We report on the study and modeling of the structural and optical properties of rib-loaded waveguides working in the 600-900-nm spectral range. A Si nanocrystal (Si-nc) rich SiO2 layer with nominal Si excess ranging from 10% to 20% was produced by quadrupole ion implantation of Si into thermal SiO2 formed on a silicon substrate. Si-ncs were precipitated by annealing at 1100°C, forming a 0.4-um-thick core layer in the waveguide. The Si content, the Si-nc density and size, the Si-nc emission, and the active layer effective refractive index were determined by dedicated experiments using x-ray photoelectron spectroscopy, Raman spectroscopy, energy-filtered transmission electron microscopy, photoluminescence and m-lines spectroscopy. Rib-loaded waveguides were fabricated by photolithographic and reactive ion etching processes, with patterned rib widths ranging from 1¿to¿8¿¿m. Light propagation in the waveguide was observed and losses of 11dB/cm at 633 and 780 nm were measured, modeled and interpreted. |
Note: | Reproducció del document publicat a: http://dx.doi.org/10.1063/1.1876574 |
It is part of: | Journal of Applied Physics, 2005, vol. 97, núm. 7, p. 074312/1-074312/8 |
URI: | http://hdl.handle.net/2445/24824 |
Related resource: | http://dx.doi.org/10.1063/1.1876574 |
ISSN: | 0021-8979 |
Appears in Collections: | Articles publicats en revistes (Enginyeria Electrònica i Biomèdica) |
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