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Title: Fine speckle contrast in InGaAs/InP systems: Influence of layer thickness, missmatch, and growing temperature
Author: Peiró Martínez, Francisca
Cornet i Calveras, Albert
Herms Berenguer, Atilà
Morante i Lleonart, Joan Ramon
Clark, S. A.
Williams, R. H.
Keywords: Pel·lícules fines
Feixos moleculars
Thin films
Molecular beams
Issue Date: 1993
Publisher: American Institute of Physics
Abstract: This work is focused on the study of the fine speckle contrast present in planar view observations of matched and mismatched InGaAs layers grown by molecular beam epitaxy on InP substrates. Our results provide experimental evidence of the evolution of this fine structure with the mismatch, layer thickness, and growth temperature. The correlation of the influence of all these parameters on the appearance of the contrast modulation points to the development of the fine structure during the growth. Moreover, as growth proceeds, this structure shows a dynamic behavior which depends on the intrinsic layer substrate stress.
Note: Reproducció del document publicat a:
It is part of: Journal of Applied Physics, 1993, vol. 73, num. 9, p. 4319-4323
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ISSN: 0021-8979
Appears in Collections:Articles publicats en revistes (Enginyeria Electrònica i Biomèdica)

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