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Title: Characterization of nano-oxide layers fabricated by ion beam oxidation
Author: Cardoso, Susana
Zongzhi Zhang
Haohua Li
Ferreira, R.
Freitas, P. P.
Peng, Wei
Soares, J. C.
Snoeck, E.
Batlle Gelabert, Xavier
Keywords: Oxidació
Aliatges de cobalt
Col·lisions (Física nuclear)
Aliatges de ferro
Plasma (Gasos ionitzats)
Microscòpia electrònica de transmissió
Efecte túnel
Cobalt alloys
Collisions (Nuclear physics)
Iron alloys
Plasma (Ionized gases)
Transmission electron microscopy
Tunneling (Physics)
Issue Date: 2002
Publisher: IEEE
Abstract: In this paper, a remote O2 ion source is used for the formation of nano-oxide layers. The oxidation efficiency was measured in CoFe-oxide films, and a decrease of the oxide layer with the pan angle and the oxidation pressure is observed. For the same oxidation pressure, the oxidation efficiency depends on the O2 content in the Ar-O2 plasma. These results were applied in optimizing the fabrication of Al2O3 barrier for tunnel junctions. This method was also used to fabricate junctions with Fe-oxide layers inserted at the Al2O3-CoFe interface. TEM and magnetization data indicate that after anneal at 385°C, a homogeneous ferromagnetic Fe-oxide layer (Fe3O4?) is formed.
Note: Reproducció del document publicat a
It is part of: IEEE Transactions on Magnetics, 2002, vol. 38, núm. 5 (Part 1), p. 2755-2757.
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ISSN: 0018-9464
Appears in Collections:Articles publicats en revistes (Física de la Matèria Condensada)

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