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http://hdl.handle.net/2445/98759
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DC Field | Value | Language |
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dc.contributor.author | Izquierdo, Ricardo | - |
dc.contributor.author | Bertomeu i Balagueró, Joan | - |
dc.contributor.author | Suys, Marc | - |
dc.contributor.author | Sacher, Edward | - |
dc.contributor.author | Meunier, Michel | - |
dc.date.accessioned | 2016-05-23T13:58:55Z | - |
dc.date.available | 2016-05-23T13:58:55Z | - |
dc.date.issued | 1995 | - |
dc.identifier.issn | 0169-4332 | - |
dc.identifier.uri | http://hdl.handle.net/2445/98759 | - |
dc.description.abstract | Copper films have been deposited on TiN and fluoropolymer substrates from the KrF excimer-laser-assisted decomposition of Cu(hfac)(TMVS). Using H2 as the carrier gas, very uniform, shiny metal-like films were deposited with grain size of 50 to 100 nm. XPS measurements show that the precursor is reduced to metallic copper, and that a Cu/C atomic ratio of up to 17 is obtained. | - |
dc.format.extent | 5 p. | - |
dc.format.mimetype | application/pdf | - |
dc.language.iso | eng | - |
dc.publisher | Elsevier B.V. | - |
dc.relation.isformatof | Versió postprint del document publicat a: http://dx.doi.org/10.1016/0169-4332(94)00439-0 | - |
dc.relation.ispartof | Applied Surface Science, 1995, vol. 86, num. 1-4, p. 509-513 | - |
dc.relation.uri | http://dx.doi.org/10.1016/0169-4332(94)00439-0 | - |
dc.rights | (c) Elsevier B.V., 1995 | - |
dc.source | Articles publicats en revistes (Física Aplicada) | - |
dc.subject.classification | Coure | - |
dc.subject.classification | Làsers | - |
dc.subject.classification | Pel·lícules metàl·liques | - |
dc.subject.other | Copper | - |
dc.subject.other | Lasers | - |
dc.subject.other | Metallic films | - |
dc.title | Excimer laser induced deposition of copper from Cu(hfac)(TMVS) | - |
dc.type | info:eu-repo/semantics/article | - |
dc.type | info:eu-repo/semantics/acceptedVersion | - |
dc.identifier.idgrec | 114375 | - |
dc.date.updated | 2016-05-12T13:28:06Z | - |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | - |
Appears in Collections: | Articles publicats en revistes (Física Aplicada) |
Files in This Item:
File | Description | Size | Format | |
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114375.pdf | 600.88 kB | Adobe PDF | View/Open |
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