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Title: | Size dependence of refractive index of Si nanoclusters embedded in SiO2 |
Author: | Moreno Pastor, José Antonio Garrido Fernández, Blas Pellegrino, Paolo García Favrot, Cristina Arbiol i Cobos, Jordi Morante i Lleonart, Joan Ramon Marie, P. Gourbilleau, Fabrice Rizk, Richard |
Keywords: | Propietats òptiques Matèria condensada Espectroscòpia Cristal·lografia Optical properties Condensed matter Spectrum analysis Crystallography |
Issue Date: | 8-Jul-2005 |
Publisher: | American Institute of Physics |
Abstract: | he complex refractive index of SiO2 layers containing Si nanoclusters (Si-nc) has been measured by spectroscopic ellipsometry in the range from 1.5 to 5.0 eV. It has been correlated with the amount of Si excess accurately measured by x-ray photoelectron spectroscopy and the nanocluster size determined by energy-filtered transmission electron microscopy. The Si-nc embedded in SiO2 have been produced by a fourfold Si+ ion implantation, providing uniform Si excess aimed at a reliable ellipsometric modeling. The complex refractive index of the Si-nc phase has been calculated by the application of the Bruggeman effective-medium approximation to the composite media. The characteristic resonances of the refractive index and extinction coefficient of bulk Si vanish out in Si-nc. In agreement with theoretical simulations, a significant reduction of the refractive index of Si-nc is observed, in comparison with bulk and amorphous silicon. The knowledge of the optical properties of these composite layers is crucial for the realization of Si-based waveguides and light-emitting devices. |
Note: | Reproducció del document publicat a: http://dx.doi.org/10.1063/1.1943512 |
It is part of: | Journal of Applied Physics, 2005, vol. 98, núm. 1, p. 013523-013526 |
URI: | http://hdl.handle.net/2445/24864 |
Related resource: | http://dx.doi.org/10.1063/1.1943512 |
ISSN: | 0021-8979 |
Appears in Collections: | Articles publicats en revistes (Enginyeria Electrònica i Biomèdica) |
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