Plasma parameters of pulsed-dc discharges in methane used to deposit diamondlike carbon films

Please use this identifier to cite or link to this item: http://hdl.handle.net/2445/24963

Title:	Plasma parameters of pulsed-dc discharges in methane used to deposit diamondlike carbon films
Authors:	Corbella Roca, Carles Rubio-Roy, M. Bertrán Serra, Enric Andújar Bella, José Luis
Matèria:	Metà Electrons Pel·lícules fines Revestiments protectors Aplicacions industrials Plasma (Gasos ionitzats) Methane Electrons Thin films Protective coatings Industrial applications Plasma (Ionized gases)
Issue Date:	5-Aug-2009
Publisher:	American Institute of Physics
Nota:	Reproducció del document publicat a: http://dx.doi.org/10.1063/1.3183945
És part de:	Journal of Applied Physics, 2009, vol. 106, núm. 3, p. 033302
URI:	http://hdl.handle.net/2445/24963
DOI:	http://dx.doi.org/10.1063/1.3183945
ISSN:	0021-8979
Appears in Collections:	Articles publicats en revistes (Física Aplicada i Òptica)

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