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Title: Plasma parameters of pulsed-dc discharges in methane used to deposit diamondlike carbon films
Author: Corbella Roca, Carles
Rubio-Roy, M.
Bertrán Serra, Enric
Andújar Bella, José Luis
Keywords: Metà
Pel·lícules fines
Revestiments protectors
Aplicacions industrials
Plasma (Gasos ionitzats)
Thin films
Protective coatings
Industrial applications
Plasma (Ionized gases)
Issue Date: 5-Aug-2009
Publisher: American Institute of Physics
Note: Reproducció del document publicat a:
It is part of: Journal of Applied Physics, 2009, vol. 106, núm. 3, p. 033302
Related resource:
ISSN: 0021-8979
Appears in Collections:Articles publicats en revistes (Física Aplicada)

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