Please use this identifier to cite or link to this item:
http://hdl.handle.net/2445/47148
Title: | Development of laser-fired contacts for amorphous silicon layers obtained by Hot-Wire CVD |
Author: | Muñoz Ramos, David Voz Sánchez, Cristóbal Blanque, S. Ibarz, D. Bertomeu i Balagueró, Joan Alcubilla González, Ramón |
Keywords: | Deposició química en fase vapor Alumini Cèl·lules solars Làsers Corrosió i anticorrosius Semiconductors Chemical vapor deposition Aluminum Solar cells Lasers Corrosion and anti-corrosives Semiconductors |
Issue Date: | 2009 |
Publisher: | Elsevier B.V. |
Abstract: | In this work we study aluminium laser-fired contacts for intrinsic amorphous silicon layers deposited by Hot-Wire CVD. This structure could be used as an alternative low temperature back contact for rear passivated heterojunction solar cells. An infrared Nd:YAG laser (1064 nm) has been used to locally fire the aluminium through the thin amorphous silicon layers. Under optimized laser firing parameters, very low specific contact resistances (ρc ∼ 10 mΩ cm2) have been obtained on 2.8 Ω cm p-type c-Si wafers. This investigation focuses on maintaining the passivation quality of the interface without an excessive increase in the series resistance of the device. |
Note: | Versió postprint del document publicat a: http://dx.doi.org/10.1016/j.mseb.2008.10.049 |
It is part of: | Materials Science and Engineering B-Solid State Materials for Advanced Technology, 2009, vol. 159-160, p. 23-26 |
URI: | http://hdl.handle.net/2445/47148 |
Related resource: | http://dx.doi.org/10.1016/j.mseb.2008.10.049 |
ISSN: | 0921-5107 |
Appears in Collections: | Articles publicats en revistes (Física Aplicada) |
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