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2011

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cc-by-nc-nd (c) Duarte, J.E. et al., 2011
Please use this identifier to cite or link to this item: https://hdl.handle.net/2445/69309

Design and characterization of thermally actuated bimetallic membranes by Michelson interferometry

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Abstract

This paper presents the design and characterization of thermally actuated Al-Si bimetallic membranes. The design was made with the Finite Element Method and was emphasized on optimizing the thickness ratio between the aluminum and silicon layers. The membrane deflection was measured employing the Michelson Interferometer. The experimental process was carried out with square membranes of 5 mm of side length, 10 mm in silicon thickness, and an aluminum thicknesses of 4 and 1 mm. A maximum deflection of 14 mm was obtained for membranes with 4 mm of aluminum thickness, which is consistent with predictions made by numerical calculations.

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Interferometria, Mètode dels elements finits, Bimetal·lisme

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Interferometry, Finite element method, Bimetallism

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DUARTE, Julio Enrique, FERNÁNDEZ MORALES, Flavio Humberto and MARTÍN BADOSA, Estela. Design and characterization of thermally actuated bimetallic membranes by Michelson interferometry. DYNA. 2011. Vol. 78, num. 166, pags. 75-80. ISSN 0012-7353. [consulted: 9 of June of 2026]. Available at: https://hdl.handle.net/2445/69309

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