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Nanocrystalline silicon thin films on PEN substrates

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We study the structural and electrical properties of intrinsic layer growth close to the transition between amorphous silicon (a-Si:H) and nanocrystalline silicon (nc-Si:H), deposited on glass and PEN without intentional heating. These samples showed different behaviour in Raman shift and XRD spectra when compared with that of samples deposited at 200 °C. Electrical properties of these films also reflect the transition between a-Si:H and nc-Si:H, and put in evidence some differences between the microstructure of the films grown on PEN and on glass. P- and n-doped layers were deposited onto glass substrate without intentional heating and at 100 °C with thicknesses ranging from 1000 nm to 35 nm. Conductivity measurements indicate the capability of doping this material, but, for very thin layers, substrate heating was found to be essential.

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VILLAR, Fernando, ESCARRÉ I PALOU, Jordi, ANTONY, Aldrin, STELLA, Marco, ROJAS TARAZONA, Fredy e., ASENSI LÓPEZ, José miguel, BERTOMEU I BALAGUERÓ, Joan, ANDREU I BATALLÉ, Jordi. Nanocrystalline silicon thin films on PEN substrates. _Thin Solid Films_. 2007. Vol. 516, núm. 5, pàgs. 584-587. [consulta: 21 de gener de 2026]. ISSN: 0040-6090. [Disponible a: https://hdl.handle.net/2445/98100]

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