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2012

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Si us plau utilitzeu sempre aquest identificador per citar o enllaçar aquest document: https://hdl.handle.net/2445/48249

Anisotropic surface properties of micro/nanostructured a-C:H:F thin films with self-assembly applications

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http://dx.doi.org/10.1063/1.4730783

Resum

The singular properties of hydrogenated amorphous carbon (a-C:H) thin filmsdeposited by pulsed DC plasma enhanced chemical vapor deposition (PECVD), such as hardness and wear resistance, make it suitable as protective coating with low surface energy for self-assembly applications. In this paper, we designed fluorine-containing a-C:H (a-C:H:F) nanostructured surfaces and we characterized them for self-assembly applications. Sub-micron patterns were generated on silicon through laser lithography while contact angle measurements, nanotribometer, atomic force microscopy (AFM), and scanning electron microscopy (SEM) were used to characterize the surface. a-C:H:F properties on lithographied surfaces such as hydrophobicity and friction were improved with the proper relative quantity of CH4 and CHF3 during deposition, resulting in ultrahydrophobic samples and low friction coefficients. Furthermore, these properties were enhanced along the direction of the lithographypatterns (in-plane anisotropy). Finally, self-assembly properties were tested with silicananoparticles, which were successfully assembled in linear arrays following the generated patterns. Among the main applications, these surfaces could be suitable as particle filter selector and cell colony substrate.

Matèries

Carboni, Pel·lícules fines, Microelectrònica, Anisotropia, Nanopartícules, Materials biomèdics

Matèries (anglès)

Carbon, Thin films, Microelectronics, Anisotropy, Nanoparticles, Biomedical materials

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Citació

FREIRE SOLER, Víctor manuel, CORBELLA ROCA, Carles, BERTRÁN SERRA, Enric, PORTAL, Sabine, RUBIO ROY, Miguel, ANDÚJAR BELLA, José luis. Anisotropic surface properties of micro/nanostructured a-C:H:F thin films with self-assembly applications. _Journal of Applied Physics_. 2012. Vol. 111, núm. 124323-12431. [consulta: 20 de gener de 2026]. ISSN: 0021-8979. [Disponible a: https://hdl.handle.net/2445/48249]

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