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Procedure to characterize microroughness of optical thin films: application to ion-beam-sputtered vacuum-ultraviolet coatings
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A method for characterizing the microroughness of samples in optical coating technology is developed. Measurements over different spatial-frequency ranges are composed into a single power spectral density (PSD) covering a large bandwidth. This is followed by the extraction of characteristic parameters through fitting of the PSD to a suitable combination of theoretical models. The method allows us to combine microroughness measurements performed with different techniques, and the fitting procedure can be adapted to any behavior of a combined PSD. The method has been applied to a set of ion-beam-sputtered fluoride vacuum-UV coatings with increasing number of alternative low- and high-index layers. Conclusions about roughness development and microstructural growth are drawn.
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FERRÉ BORRULL, Josep, DUPARRÉ, Angela, QUESNEL, Etienne. Procedure to characterize microroughness of optical thin films: application to ion-beam-sputtered vacuum-ultraviolet coatings. _Applied Optics_. 2001. Vol. 40, núm. 13, pàgs. 2190-2199. [consulta: 23 de gener de 2026]. ISSN: 0003-6935. [Disponible a: https://hdl.handle.net/2445/24308]