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Article

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Published version

Publication date

1991

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Please use this identifier to cite or link to this item: https://hdl.handle.net/2445/32237

Optical absorption and graphitic clusters of hydrogenated amorphophous carbon thin films

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http://dx.doi.org/10.1063/1.349023

Abstract

The optical absorption of hydrogenated amorphous carbon films (a‐C:H) was measured by spectroscopic ellipsometry. The a‐C:H films were deposited at different substrate temperatures by rf‐plasma of methane. A volume distribution of graphitic cluster size was assumed to reproduce the experimental spectra of the absorption coefficient. The changes in the absorption coefficient and the optical gap, induced by deposition temperature, have been interpreted in terms of changes in the graphitic cluster size of the network. The increase in the deposition temperature produces an increase in the size of the graphitic clusters.

Subject

Carboni, Pel·lícules fines

Subject (English)

Carbon, Thin films

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Articles publicats en revistes (Física Aplicada)

Citation

PASCUAL MIRALLES, Esther, SERRA RODRÍGUEZ, Carmen and BERTRÁN SERRA, Enric. Optical absorption and graphitic clusters of hydrogenated amorphophous carbon thin films. Journal of Applied Physics. 1991. Vol. 70, num. 9, pags. 5119-5121. ISSN 0021-8979. [consulted: 11 of June of 2026]. Available at: https://hdl.handle.net/2445/32237

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