Files
Document type
ArticleVersion
Published versionPublication date
Publication license
Please use this identifier to cite or link to this item: https://hdl.handle.net/2445/219744
Spectroscopic ellipsometry of very rough surfaces
Journal Title
Authors
Director/Tutor
Journal ISSN
Volume Title
Related resource
Abstract
This work expands the use of spectroscopic ellipsometry to surfaces with roughness that is similar to or larger than the wavelength of the incident light. By using a custom-built spectroscopic ellipsometer and varying the angle of incidence, we were able to differentiate between the diffusely scattered and specularly reflected components. Our findings demonstrate that measuring the diffuse component at specular angles is highly beneficial for ellipsometry analysis, as its response is equivalent to that of a smooth material. This allows for accurate determination of the optical constants in materials with extremely rough surfaces. Our results have the potential to broaden the scope and utility of the spectroscopic ellipsometry technique.
Subject
Subject (English)
Citation
Citation
BIAN, Subiao and ARTEAGA BARRIEL, Oriol. Spectroscopic ellipsometry of very rough surfaces. Optics Express. 2023. Vol. 31, num. 12, pags. 19632-19645. ISSN 1094-4087. [consulted: 7 of June of 2026]. Available at: https://hdl.handle.net/2445/219744